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C&EN2d
Enhanced Photoluminescence of Multiple Two-Dimensional van der Waals Heterostructures Fabricated by Layer-by-Layer Oxidation of MoS
KU-KIST Graduate School of Converging Science and Technology, and Department of Integrative Energy Engineering, Korea University, Seoul 02841, Korea Department of Integrative Energy Engineering, Korea ...
IEEE5d
Cu–Cu Bonding Using Selective Cobalt Atomic Layer Deposition for 2.5-D/3-D Chip Integration Technologies
Abstract: The feasibility of using selective thermal cobalt metal (Co) atomic layer deposition (ALD) as high density Cu-Cu interconnect bonding is demonstrated at a low temperature (200 °C) and with ...